Lammel, MichaelaThomas, Andy2020-11-142026-05-202020-11-142026-05-202018-20202020-11-14https://opara.zih.tu-dresden.de/handle/123456789/2401https://doi.org/10.25532/OPARA-102Fast Fourier transform and multi-Gaussian fitting of XRR data to determine the thickness of ALD grown thin films within the initial growth regime (FFT_XRR_ALD). Jupyter notebook for the evaluation of XRR data by utilizing fast Fourier transformation and a multi-Gaussian fitting routine for the determination of ultra thin ALD films within the initial growth regime. One example measurement is included.Attribution 4.0 Internationalhttp://creativecommons.org/licenses/by/4.0/3::324::43::4063::31