This database supports modeling transformation pathways in Germany’s process industry sector by providing techno-economic data for processes associated with at least one conventional or low carbon production system having as main output alumina, ammonia, bricks, chlorine, clinker, container glass, corrugated board, float glass, high value chemicals, methanol, newspaper, other graphic paper, primary aluminum, primary copper, primary steel, quicklime, refractories, secondary aluminum, secondary steel, soda ash, tissue, or urea. The techno-economic data comprise availability factors and lifetimes of industrial process facilities, normalized investments for both new conventional process facilities and for the defossilization of existing process facilities, energy and raw material inputs, by-product outputs, and market entry years of processes. Additionally, the database provides both statistics and scenario assumptions on annual industrial production volumes, purchase prices for inputs, sales prices for by-products, European Emission Allowance prices, and carbon dioxide intensities of the inputs used in the processes. To reflect variability in literature values, especially regarding energy and material flows, investments, and other techno-economic assumptions, the dataset provides intervals consisting of a reference value (REF) representing the median of the available data, as well as an upper bound (UB) reflecting the less optimistic and a lower bound (LB) representing the more optimistic range of specifications regarding costs available for a process.