Jupyter notebook code and example file for the evaluation of XRR data via FFT

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2020-11-14

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Technische Universität Dresden

Abstract

Fast Fourier transform and multi-Gaussian fitting of XRR data to determine the thickness of ALD grown thin films within the initial growth regime (FFT_XRR_ALD). Jupyter notebook for the evaluation of XRR data by utilizing fast Fourier transformation and a multi-Gaussian fitting routine for the determination of ultra thin ALD films within the initial growth regime. One example measurement is included.

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Attribution 4.0 International