Jupyter notebook code and example file for the evaluation of XRR data via FFT
Contributing person | IFW Dresden | |
References to related material | arXiv:2008.04626 | |
References to related material | Publication: "Fast fourier transform and multi-Gaussian fitting of XRR data to determine the thickness of ALD grown thin films within the initial growth regime" | |
Description of the data | XRR data of /Fe2O3/Y2O3 double layer on Si/SiO2 substrate | |
Type of the data | Software | |
Type of the data | Dataset | |
Type of the data | Model | |
Total size of the dataset | 168415 | |
Author | Lammel, Michaela | |
Author | Thomas, Andy | |
Upload date | 2020-11-14T14:41:16Z | |
Upload date | 2026-05-20T15:13:30Z | |
Publication date | 2020-11-14T14:41:16Z | |
Publication date | 2026-05-20T15:13:30Z | |
Data of data creation | 2018-2020 | |
Publication date | 2020-11-14 | |
Abstract of the dataset | Fast Fourier transform and multi-Gaussian fitting of XRR data to determine the thickness of ALD grown thin films within the initial growth regime (FFT_XRR_ALD). Jupyter notebook for the evaluation of XRR data by utilizing fast Fourier transformation and a multi-Gaussian fitting routine for the determination of ultra thin ALD films within the initial growth regime. One example measurement is included. | |
Public reference to this page | https://opara.zih.tu-dresden.de/handle/123456789/2401 | |
Public reference to this page | https://doi.org/10.25532/OPARA-102 | |
dc.language | eng | |
Publisher | Technische Universität Dresden | |
Licence | Attribution 4.0 International | |
URI of the licence text | http://creativecommons.org/licenses/by/4.0/ | |
Specification of the discipline(s) | 3::32 | |
Specification of the discipline(s) | 4::43::406 | |
Specification of the discipline(s) | 3::31 | |
Title of the dataset | Jupyter notebook code and example file for the evaluation of XRR data via FFT | |
Software | Python (Version 3.x) |
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