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Person(s) who is (are) responsible for the content of the research dataLammel, Michaela
Person(s) who is (are) responsible for the content of the research dataThomas, Andy - TU Dresden
AbstractThis is supplementary information to the publication: "Fast fourier transform and multi-Gaussian fitting of XRR data to determine the thickness of ALD grown thin films within the initial growth regime"
Additional keywordsXRR
Additional keywordsFFT
Additional keywordsALD
Languageeng
Year or period of data production2018-2020
Publication year2020
PublisherTechnische Universität Dresden
PublisherIFW Dresden
References on related materialsIsSupplementTo: arXiv:2008.04626 (arXiv)
Content of the research dataDataset, Model, Software: XRR data of /Fe2O3/Y2O3 double layer on Si/SiO2 substrate
Holder of usage rightsTechnische Universität Dresden
Holder of usage rightsIFW Dresden
Usage rights of the dataCC-BY-4.0
SoftwareResource Production: Python 3.x
Discipline(s)Chemistryde
Discipline(s)Materials Sciencede
Discipline(s)Physicsde
Title of the datasetJupyter notebook code and example file for the evaluation of XRR data via FFT


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  • Jupyter notebook and example data [1]Open Access Icon
    Supplementary material to the publication: "Fast fourier transform and multi-Gaussian fitting of XRR data to determine the thickness of ALD grown thin films within the initial growth regime"

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