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Jupyter notebook code and example file for the evaluation of XRR data via FFT
Metadata
Person(s) who is (are) responsible for the content of the research data | Lammel, Michaela | |
Person(s) who is (are) responsible for the content of the research data | Thomas, Andy - TU Dresden | |
Abstract | This is supplementary information to the publication: "Fast fourier transform and multi-Gaussian fitting of XRR data to determine the thickness of ALD grown thin films within the initial growth regime" | |
Additional keywords | XRR | |
Additional keywords | FFT | |
Additional keywords | ALD | |
Language | eng | |
Year or period of data production | 2018-2020 | |
Publication year | 2020 | |
Publisher | Technische Universität Dresden | |
Publisher | IFW Dresden | |
References on related materials | IsSupplementTo: arXiv:2008.04626 (arXiv) | |
Content of the research data | Dataset, Model, Software: XRR data of /Fe2O3/Y2O3 double layer on Si/SiO2 substrate | |
Holder of usage rights | Technische Universität Dresden | |
Holder of usage rights | IFW Dresden | |
Usage rights of the data | CC-BY-4.0 | |
Software | Resource Production: Python 3.x | |
Discipline(s) | Chemistry | de |
Discipline(s) | Materials Science | de |
Discipline(s) | Physics | de |
Title of the dataset | Jupyter notebook code and example file for the evaluation of XRR data via FFT |
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Jupyter notebook and example data [1]
Supplementary material to the publication: "Fast fourier transform and multi-Gaussian fitting of XRR data to determine the thickness of ALD grown thin films within the initial growth regime"