| Person(s) who is (are) responsible for the content of the research data | Lammel, Michaela | |
| Person(s) who is (are) responsible for the content of the research data | Thomas, Andy - TU Dresden | |
| Abstract | This is supplementary information to the publication: "Fast fourier transform and multi-Gaussian fitting of XRR data to determine the thickness of ALD grown thin films within the initial growth regime" | |
| Additional keywords | XRR | |
| Additional keywords | FFT | |
| Additional keywords | ALD | |
| Language | eng | |
| Year or period of data production | 2018-2020 | |
| Publication year | 2020 | |
| Publisher | Technische Universität Dresden | |
| Publisher | IFW Dresden | |
| References on related materials | IsSupplementTo: arXiv:2008.04626 (arXiv) | |
| Content of the research data | Dataset, Model, Software: XRR data of /Fe2O3/Y2O3 double layer on Si/SiO2 substrate | |
| Holder of usage rights | Technische Universität Dresden | |
| Holder of usage rights | IFW Dresden | |
| Usage rights of the data | CC-BY-4.0 | |
| Software | Resource Production: Python 3.x | |
| Discipline(s) | Chemistry | de |
| Discipline(s) | Materials Science | de |
| Discipline(s) | Physics | de |
| Title of the dataset | Jupyter notebook code and example file for the evaluation of XRR data via FFT | |
