Fast Fourier transform and multi-Gaussian fitting of XRR data to determine the thickness of ALD grown thin films within the initial growth regime

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Jupyter notebook for the evaluation of XRR data by utilizing fast Fourier transformation and a multi-Gaussian fitting routine for the determination of ultra thin ALD films within the initial growth regime. One example measurement is included.

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Jupyter notebook and example data [1]

Supplementary material to the publication: "Fast fourier transform and multi-Gaussian fitting of XRR data to determine the thickness of ALD grown thin films within the initial growth regime"

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Jupyter notebook code and example file for the evaluation of XRR data via FFT

Lammel, Michaela; Thomas, Andy (Technische Universität DresdenIFW Dresden, 2020)

This is supplementary information to the publication: "Fast fourier transform and multi-Gaussian fitting of XRR data to determine the thickness of ALD grown thin films within the initial growth regime"